SN 6030288
Wafer size 200mm SNNF
Inline Feed Direction Left
Chamber Sendai Nikon
Lens Type 4EN2GK
Chamber Temp 23 Degrees

Reticle Size 6inch X 6inch
Field Size 25 x 33mm
Reticle Case Nikon Standard
Reticle slot 24
Reticle Libraries 2
Wafer Loader type Type 3
Chuck Type Low Contact Pin Chuck
Laser Type Komatsu Gigaphoton- G20K2